
Advanced CMP of Silicon Carbide for EVs and Power ICs ...
This white paper describes challenges specific to chemical mechanical planarization (CMP) of silicon carbide (SiC) wafers and proposes solutions to improve SiC slurry performance and meet the needs of power IC manufacturers. Advanced CMP of Silicon Carbide for EVs and Power ICs white paper. The transition from gaspowered to electric vehicles (EVs) is happening at a .